Last night we experience a compressed air outage and it is currently still down. We are working to find out when it will be back online and will report back ASAP. In the meantime, all tools in the INRF that require compressed air will be down. We apologize for any inconvenience.
Integrated Nanosystems Research Facility
It looks like the install of the new compressor for the Engineering Gateway/INRF was a success. This week we will start to bring the tools back online.
Here’s the rundown:
- STS: Needs a new DI recirculating pump. We should have that switched out shortly.
- Trion: We are waiting for the pressure control valve to come back from repair from MKS.
- Ebeam 1: We will be doing a regen and we are waiting for the chamber hardware to come back from cleaning. These parts should be back this week.
- MA6: We need to start up and check out the system.
We will send out a notice as the tools come up. Thanks for your patience
Starting tomorrow (3/17) the lab staff will start shutting down the equipment for the INRF Closure/Air Compressor Replacement. The only equipment that will remain functional throughout the replacement will be the Flood Exposure and Spinners. We will start bringing everything back online on the 28th if everything gos as planned. The BION will be unaffected.
Due to a bad throttle valve. We hope to have it back up the week of the 28th.
INRF and BiON are going to be offering three different workshops: Lithography, Metal Deposition and Reactive Ion Etching. The purpose of these workshops is to give you more familiarity with the tools and their capabilities and to give you the best end result that the tool is able to perform to. These workshops will consist of some lectures but mostly hands on.
You need to register and need to be a INRF or BiON user in order to attend the following workshops.
For all upcoming workshops, you may view our Workshop Events Calendar.
For any questions, contact Dexter Humphrey at dexterh@uci.edu.
The INRF cleanroom will be closed March 18th – 28th in order to replace the buildings air compressor. As you know, we have been experiencing problems with low pressure and oil in the air lines for years now. This should remedy those issues and open up more possibilities for the cleanroom in the future.
The BION will remain open during this time.
NOTE: All compressed air to the Engineering Gateway West wing building will be shut down during this time. This will effect all 3rd floor labs as well.
We have purchased a quart of AZ 5214-E IR Photoresist and we are looking to see if there is any interest from the users for us to carry this product in our store. It would roughly sell for $70ea (60ml dropper). The spec sheets have been attached for your review. Please email us and let us know if you are interested sryan@uci.edu
DI Water has been shutdown today. Users will have will not be able to utilize most Lithography equipment and will not be able to perform chemical processing. We will keep you updated on when this capability will return. If there are any questions please contact Jake Hess.
The water utility shutdown affects industrial cold water, industrial hot water and deionized water.
Scheduled to begin at 5:00 AM, lasting for approximately 12 hours, and ending at approximately 5:00 PM the same day
- Monday, January 18th is a campus Holiday (Martin Luther King Day)
- The INRF and BION cleanrooms will remain open throughout the Holiday break.
- All the tools will be accessible for those with access to them however HF (rm 1432) & Inorganic (rm 1421) rooms will be closed.
- INRF Office will be closed and lab staff will be off during this time.
- If you plan on using the lab and don’t have 24hr access, please contact Dexter or Richard.
- Please contact Jake via cell/text immediately if you have any issues with the tools or other emergencies. (Do not email your issue!)