Integrated Nanosystems Research Facility

Diffusion Furnaces


6″ Dry & Wet Oxidation Tube
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4″ Dry Oxidation Tube
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4″ Long Anneal Tube
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4″ Sintering Tube
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4″ Boron Tube
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2″ Nano furnace Tube
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4″ Min-Brute Tube
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Heatpulse 610 RTA
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Anodic Bonding Furnace
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