Equipment SOPs

• 2-inch Nano Furnace Notebook
• 5-inch Nano Multi-Purpose Furnace Notebook
• Anicon Notebook
• Applied MST MVD 100
• Atmospheric Diffusion Furnace Policy Notebook
• Atomic Layer Deposition
• BMR HIDEP Notebook
• CHA Mark 50 Evaporation
• CHA Therma EVP Notebook
• E-Beam 1 Evaporation Notebook
• First Nano Furnace (EasyTube 3000 System)
• HMDS Oven
• Karl Suss MA6 Notebook
• Laurell Notebook
• Technics 500 II (O2 Techn) Notebook
• PE 2400 Sputtering (For Dielectric Materials) Policy Notebook
• PE 4400 Sputtering (For Metallic Materials) Policy Notebook
• Plasmatherm (PECVD & RIE) Notebook
• Quintel Mask Aligner Notebook
• SEM Hitachi S4700 / EDA Policy Notebook
• STS System DRIE Notebook
• Tousimis 815B Series C Notebook
• Trion ICP/RIE Notebook
• Ushio Inc. Photo Bonding System
• XeF2 Pulsing Etcher Notebook