Integrated Nanosystems Research Facility

Deposition


Atomic Layer Deposition (ALD)
Photos | Video | Information | SOP

CHA Mark 50 Evaporation
Photos | Information

CHA Thermal Evaporation
Photos | Information | SOP

E-Beam 1 Evaporation
Photos | Information | SOP

E-Beam 2 Evaporation
Photos

PE 4400 Sputtering
Photos | Information | SOP

PE 2400 Sputtering A
Photos | Information | SOP

PE 2400 Sputtering B
Photos | Information | SOP