PE 2400 Sputtering

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A sputtering system with an RF generator. It has a manual load system, and 6 table positions.

• RF etch
• DC and RF deposition stations
• PE 2KW RF power supply
• AE MDX DC P/S
• Digital clock timer
• PE digital gauge controller
• PE pump (valving) controller
• PE match controller
• CTI Cryo regen controller
• CTI 8" Cryo pump with compressor
• Alcatel 2063 roughing pump.