About

The Integrated Nanosystems Research Facility at the University of California, Irvine (INRF UCI) in the Henry Samueli School of Engineering is a world-class clean room devoted to research and development for integrated systems at micro- and nano-size scales. Our facility features more than 9,600 square feet of Class 1000/100 clean-room space, highly trained technical staff and a large variety of equipment for thin films processing, microfabrication and materials growth. INRF offers users the capability to incorporate non-standard processes and materials, pushing the boundaries of new fabrication techniques and integration at ultra-small scales.

INRF supports academic research from all units on the UC Irvine campus and neighboring universities. Our faculty and technical staff can bring advanced micro/nanotechnology to your research projects, and also can assist with purchasing support, grant preparation and management, and personnel administration. In addition, we can assist in connecting you with other faculty who have related expertise.

INRF is affiliated with the California Institute for Telecommunications and Information Technology (Calit²), a two-campus, multidisciplinary research institute with locations at UC San Diego and UC Irvine. The institute’s goal is to develop innovative information technology-based products and services to benefit society. One key component in facilitating this goal was the construction of the Bio-Organic Nanofabrication facility (BiON) in the Calit² Building.