Integrated Nanosystems Research Facility

CVD System

Plasma-Therm PECVD Model 790
Plasma-Therm PECVD Model 790
Photos | Video | SOP

BMR Low Temp PECVD
Photos | Information | SOP

Anicon LTO CVD
Photos | Information | SOP

ASM LPCVD
Photos | Information

First Nano Furnace
Photos | Video | Information | SOP