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Monolayer Graphene Films from First Nano Furnace
Description
First Nano EasyTube 3000 system is the most advanced customizable chemical vapor deposition/annealing process tool for nanomaterials synthesis, thin film depositions and anneals. EasyTube®3000 is capable of synthesizing a myriad of nanostructures and thin film including single-walled or multi-walled nanotubes, Graphene, nanowires such as Si, Ge, ZnO, GaN, BN, and thin film such as Si, SiO2 and Si3N4 using selected combinations of hydrides, liquids and/or solid precursors. The system can also be customized for Annealing, Selenization and/or Sulfurization applications.
The EasyTube® systems are now being used for process development and/or materials growth across many industries including nanoelectronics, semiconductor, photovoltaic, NEMS/MEMS, composite, structural coatings, etc.
Specification