Integrated Nanosystems Research Facility

Lithography


Canon i4 4000 Stepper
Photos | Information

FEI SEM / E-Beam Writer
Photos

Karl Suss MA6 Mask Aligner
Photos | Video | Information | SOP

Karl Suss MJB-3 Mask Aligner
Photos | Information

Kasper Mask Aligner model 3001
Photos | Information

Quintel Mask Aligner
Photos | Information | SOP

UV Flood exposure system
Photos | Information

Solitec Spinner Model 5110-CT
Photos | Information

Solitec Spinner Model 5110-ND
Photos | Information

Solitec Spinner Model 5110-C-TD
Photos | Information

HMDS Oven
Photos | Video | SOP

Laurell Photoresist Spinner
Photos | Video | SOP