Integrated Nanosystems Research Facility

Canon i4 4000 Stepper (staff tool)

Canon icon-view-photos View Photo Gallery

  • Projection magnification (1/5 x)
  • Exposure light (i-line)
  • Resolution (<0.35 um (std illum.)
  • Field size (6” x 0.25t) Cr surface only (frame height 6.3 mm) reticle