Video Tutorials & Demos
Sometimes you just need to see something done to understand it. These videos will help you to understand standard procedures to enter the cleanrooms facilities and how to operate the tools safely and properly. You may also view our Youtube channel
Videos marked with a cc icon have captions, and can be turned on at any point in the video by clicking on the icon in the Youtube player.
Entering the cleanrooms
Before entering the cleanrooms, you need to make sure you are prepared to enter safely and properly! Carlos takes you through the standard procedures of entering into the INRF / BiON cleanrooms. Topics covered include logging in, properly and safely putting on your cleanroom suits, and more.
Standard Operating Procedures
Ushio Inc. Photo Bonding System
Select Chapter Check Status of the Tool & Confirm it is in Idle State Begin Using the Tool and Setup the Initial Conditions Introducing Components in the Main Bonding Unit Moving the Excimer Photon Source and its Positions Set the Stage Height According to Substrate Thickness Load Substrates, Zero Out of the Force… Bond Substrates for Desired Time… Return System to Proper Idle State…
Trion ICP / RIE Dry Etch
Select Chapter Overview of the tool Checking the backend equipment in the chase CDO overview Loading a sample Preparing and running a process Unloading and leaving the tool in proper standby Log sheet
XeF2 Pulsing Etcher
Select Chapter Intro to using XeF2 etching Overview of the tool Check “Stand-By” condition Chase Room Safety Info Check the roughing pump Loading a sample and using the tool Ending the process and unloading sample The log sheet Leaving the tool in “Stand-by” mode
CHA Mark 50 Evaporation
Select Chapter Hazards Stand By Mode INRF Log in / Log book Wafer Prep Tool Log on Venting Chamber Inspection Wafer Loading Measuring Gold Mass Closing and Pump Down Ion Gauges and Thermocouple Recipe Input High Voltage Automatic Deposition Deposition Check Log Book Values Cool Down Venting Pump Down Logging Off Tool
First Nano Furnace
Select Chapter Signing In and Log Book First Nano Layout Furnace Layout Hazards and Safety Information Standby Selecting Recipe & Checking Burn Box Service Chase Loading Samples Starting Growth Unloading Chamber and Samples
Applied MST MVD 100 cc
Select Chapter Chase Room Set Temperatures Load Sample Load & Run Recipe Unload Reset Temperatures
Atomic Layer Deposition cc
Select Chapter Introduction Chase Room Set Temperatures Safety Tips Load Sample Load & Run the Recipe Unload Sample
E-Beam 1 Evaporation Running & Unloading
Select Chapter E-Beam Evaporation Run Crystal Monitor Setting Substrate Unloading
STS System DRIE
Select Chapter Equipment Chase STS Tower & Log Parameters Recipes
Supplemental Videos
Introduction to Photolithography cc
Select Chapter Introduction Logging in & pre-use examination Loading a sample Programming spin speeds/running the tool Unloading and baking Clean up after processing Post spinning procedures Development of Su-8 Disposal of waste
