Integrated Nanosystems Research Facility


The following materials and supplies are provided by the INRF for general use, or for use in public general use equipment. These materials may only be used by INRF users in the clean room. Use must comply with all INRF policies regarding safe and proper use, storage and disposal. They may not be removed from the INRF clean room. Supplies must be cleaned and returned to their storage location when finished.

Most INRF supplies bear an INRF label. In addition, the INRF provides materials such as wafers for purchase from the INRF store.

General supplies

  • Safety goggles
  • Neoprene gloves
  • Nitrile gloves
  • Latex (powder-free) gloves
  • Clean room clothing


  • Acetone
  • Methanol
  • Isopropanol


  • Hydrofluoric acid
  • Sulfuric acid
  • Hydrochloric acid
  • Nitric acid
  • Acetic acid
  • Phosphoric acid

Other chemicals

  • Liquid nitrogen
  • Hydrogen peroxide
  • Ammonium hydroxide
  • Potasium hydroxide

Specialty chemicals

  • AZ400K Developer
  • MF-319
  • SU-8 Developer
  • Chlorobenzene


  • Nitrogen
  • Oxygen
  • Hydrogen
  • Helium
  • Argon
  • Silane
  • Ammonia
  • CHF3
  • CF4
  • Cl
  • BCl3