Integrated Nanosystems Research Facility

Quintel Mask Aligner

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Quintel Mask Aligner is a top and bottom side contact lithography printer with the video-view split field microscope used for fine line lithography down to 1 micron or better. It is capable of processing both 4- and 6-inch substrates.

The mask aligner consists of several coordinated, inter-related systems including:

  • Substrate loading, holding and unloading system.
  • The mask supporting system.
  • The substrate/mask/scan/align/lock system.
  • The viewing system (microscope and illuminators).
  • The exposing system.
  • Use 5-inch to 7-inch masks.