Integrated Nanosystems Research Facility

ASM LPCVD (staff tool) Low-Stress Nitride, Poly

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Nitride Tube
  • Low Stress
  • Standard
  • Substrate Size up to 6”

Nitride, Poly Tube

  • Substrate Size up to 6”

Wet Oxide/HCL for cleaning purpose of tube

  • Substrate size up to 3”