Integrated Nanosystems Research Facility

CHA Thermal evaporation (SEC-600-RAP)

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In SEC-Series systems, the baseplate (typically 20 inches) accommodates up to 15 feedthroughs for instrumentation, control and rotary motion. SEC-600 systems are most often equipped with a 19.5″ diameter bell jar and Planetary Fixturing having a capacity of 18 4″ wafers. The average pumpdown time of less than 30 minutes allows throughput in excess of 54 wafers per hour.