Integrated Nanosystems Research Facility

We should have the lab mostly up and running by this Wednesday with exception of the Mark 50. We are in the process of creating a temporary gowning room where we will have the log-in computer, gowns, glove and so on until the new flooring is installed. The entrance of the gowning room will be through room 2310 located at the end of the hall (see map below). We will make another announcement once the room is ready. Thank you for your patience.

Temporary Gowning Room Map

FREE COURSE!
Open to UCI students & Cleanroom Users!  A basic introduction to the cleanroom and what goes on inside.

WHEN:
April 27th  11AM – 3PM

WHERE:
Calit2, Room 3008

INTRODUCTION TO:

  • Cleanroom Design
  • Photolithography
  • Dry Etching
  • Wet Etching
  • Dielectric Deposition (PECVD)
  • Metal Deposition (Thin Film)
  • Microscopy and Surface Measurement
  • Surface Prolometry
  • Back End Processing
  • Wire bonding

To register for a course, visit www. inrf.uci.edu/courses. For any questions, contact Dexter Humphrey at dexterh@uci.edu

Cleanroom Fundamentals Flyer

From Facilities:

Update on the progress made since Wednesday and the plan moving forward

–          On Thursday NuAge and Plumbing sub cut open the wall on the third floor, installed a scaffolding system and replaced the defective parts. AGI was on site to address leaking issues and to relocate air movers and dehumidifiers. Tony Garrit (Central Plant) charged the line and the fitting was noted to be working properly now

–          On Friday with the leak being fixed, AGI set up containment at the end of affected corridors and around lab equipment to protect from dust as the space starts to dry out. AGI will do their best to cover and create a barrier around the equipment identified in Fridays walk through with Jordan Terrones and Jake Hes, however the facility understands that there is the possibility that dust will still get on equipment unless it is completely disconnected and removed from the space.

–          So far to note, floor tiles are going to need to be removed from W2310, W2311, W2314, W2315, W2318, W2320, & W2321 to see the extent of the water damage under the floor. As needed, flooring will be removed up to and around larger equipment and around table legs where items cannot be moved. Ceiling tiles will need to be removed in rooms W2310, W2312, & W2314 to see how far down the corridors the water travelled.

–          On Saturday AGI will have a crew of 5 guys total to remove damaged floor and ceiling tiles. Due to the extensiveness of the work, AGI may need to have a smaller crew to work on Sunday.

–          On Monday AGI will provide an assessment report of their findings and the extent of the damage.

–          After that time, the university can begin to plan the remediation of the space.

–          Central Plan was notified to shut down Eng. Gateway AHU’s 6 &7 that control cleanroom space.

–          AGI brought in Negative Air Machines to limit the dust as the space begins to dry out.

–          On Saturday AGI finished installing protection around lab equipment and began removing ceiling tiles and floor tiles from affected areas. As we began pulling up tiles the extent of how far the water travelled was realized and it was determined that AGI would need to continue work on Sunday.

–          On Sunday AGI continues to remove flooring tiles

–          Monday will consist of AGI wiping down the space of surface dust and providing assessment of their findings.

As of now the cleanroom is still closed and we will keep you updated if things change. The BION has not been effected and will remain open.

FREE COURSE!
Open to UCI students & Cleanroom Users! This is a basic introduction to the cleanroom and what goes on inside.

WHEN:
April 27th  11AM – 3PM

WHERE:
Calit2, Room 3008

INTRODUCTION TO:

  • Cleanroom Design
  • Photolithography
  • Dry Etching
  • Wet Etching
  • Dielectric Deposition (PECVD)
  • Metal Deposition (Thin Film)
  • Microscopy and Surface Measurement
  • Surface Prolometry
  • Back End Processing
  • Wire bonding

To register for a course, visit www. inrf.uci.edu/courses. For any questions, contact Dexter Humphrey at dexterh@uci.edu

Cleanroom Fundamentals Flyer

Yesterday we experienced a flood in the first half of the cleanroom due to a break in the chill-water system. Thankfully it happened where none of the critical equipment were located. Facilities is working to clean up the water and bring power back to the cleanroom. Due to the extent of the damage we are expecting the lab to be down for the rest of the week and our hope is to be up and running early next week. We will keep you posted.

In other news, the compressed air system should be operational now (once the power is restored) and parts for the Trion, Mark 50 and Ebeam1 have arrived.

NOTE: BION was unaffected and will remain open.

Due to a flood in the cleanroom the INRF will be closed for the remainder of the day for cleanup. The BION will remain open.

This is a reminder for those who have signed up for the Lithography workshop today at 2pm with Dexter Humphrey. Please meet in the INRF lobby and we will have a sign-in sheet at the front desk.

NOTE: Today’s workshop currently has one spot open. If interested please email Ryan (sryan@uci,edu) or Alana (anvalenc@uci.edu). We will be excepting standbys if there are any cancellations or no-shows.

 

 

 

According to Facilities, they will start work on the Compressor this weekend and should have it back up by Wednesday at the latest. We will keep you updated if there are any changes.

This is a reminder for those who have signed up for the Lithography workshop today at 2pm with Dexter Humphrey. Please meet in the INRF lobby and we will have a sign-in sheet at the front desk.

NOTE: Today’s workshop is currently full but we will be excepting standbys if there are any cancellations or no-shows.

This weekend we experienced that the compressed air system has not been able to run two consecutive days without an alarm.  The alarm we have been experiencing is low oil pressure / discharge temperature and high inter stage temperature. We are working with Facilities and the contractor to address these issues.  This means that quite a few pieces of equipment are still shut down due to the CDA. We share your frustration and apologize for the inconvenience. We will keep you updated.