Integrated Nanosystems Research Facility

INRF Users,

The lab air has been restored.
-STAFF

INRF Users,

The INRF compressed air is now back online. However due to lack of available parts, the compressed air will need to go down again this Thursday 2/7/19.

STAFF

INRF Users,

FM has completed DI water PM. The DI resistivity is at 16 meaohm-cm . The DI water in the INRF is back online.

 

STAFF

INRF Wet Etch RM 2325 Users,
The INRF Wet Etch RM 2325 facility air balance is out of tolerance.  The room is currently overly positive, and since this is a safety issue we are keeping the room locked and offline until the issue can be resolved.
STAFF

INRF Users,

Facilities Management will be shutting down our INRF CDA supply this Monday 7/30/18 from approx. 8am-2pm. Multiple tools will need to go offline as a result since they require CDA for proper operation (STS, Plasmatherm, E-beam, Thermal Evap, etc).
Forged should update tool status’s accordingly, but please pay extra attention to the CDA status on tools if using them later that day.  Also as always, keep an eye out for tools that are tagged out and any possible posted signage in general.
Thanks,
INRF Staff

BiON Users,

The 3 wet etch rooms are currently temporarily offline as staff looks further into the lab bench re-certifications. You may notice the electronic keycards not allow access into these 3 wet etch rooms as a result.

-Staff

INRF Users,

Facilities will be performing work in the INRF between July 28, 2017 and September 20, 2017 that will cause partial and/or full shutdown of equipment, rooms, and possibly the entire lab.  Details are currently being worked out and as further details are known we will post updates here on the Blog as well as on the Forged system as and when appropriate.

INRF Staff

 

INRF Users,
The IRNF lab compressed air issue has been resolved. This facility item is back Online.
INRF Staff
INRF Users,
Today there was a blown cylinder head on one of the compressors for the lab compressed air.  As a result the lab compressed air is down and OFFLINE.  It looks like this will be the case at least until Monday 7/17/17 but it could be offline for another week or more.  We can update again as soon as we know more.
INRF Staff

Facilities Management will be conducting leak checks on the compressed air system this Saturday (06/24). This will affect some of tools in the lab so please plan accordingly.