Integrated Nanosystems Research Facility

INRF Users,

Facilities Management will be shutting down our INRF CDA supply this Monday 7/30/18 from approx. 8am-2pm. Multiple tools will need to go offline as a result since they require CDA for proper operation (STS, Plasmatherm, E-beam, Thermal Evap, etc).
Forged should update tool status’s accordingly, but please pay extra attention to the CDA status on tools if using them later that day.  Also as always, keep an eye out for tools that are tagged out and any possible posted signage in general.
Thanks,
INRF Staff