Integrated Nanosystems Research Facility

STS Users,

A representative from BOC Edwards will be on-site tomorrow to service the STS dry pump. Due to this the STS will go offline tomorrow morning. Unless any unforeseen issues arise, the system should be back online by late afternoon.

STAFF

INRF Users,

Please be advised that on Jan 26th and Jan 27th this month, the INRF compressed air will be offline for testing.

STAFF

INRF & BiON Users,

Due to Monday Sept 4th 2018 being a campus holiday, the cleanrooms will not be staffed.  Weekend and Evening Hours policy will be in affect.  The locked wet etch rooms (3 in BiON, 1 in INRF) will be locked on this day.

 

STAFF

INRF & BiON Users,

With the 4th of July Holiday tomorrow, and due to limited staff on Friday, the INRF & BiON Wet Processing Rooms will be locked and not available for use during the following times:

1-Today 7/3/18 effective immediately
2-Tomorrow Wednesday 7/4/18 All Day
3-Friday 7/6/18 All Day

Notice: The INRF Wet Benches are now reservable like any other tool, and you must start/stop your bench session from the INRF lab entrance terminal much like the BiON benches via the BiON lab entrance terminal. Please be sure you start/end your bench sessions accordingly and reserve your bench in advance as much as possible.

 

INRF & BiON Users,

As a reminder, please attempt to reserve your equipment sessions as far ahead in advance as you can.  We’re seeing more users using the same tools and so it will best help you plan and ensure you have the enough tool time when you need and when you prefer. It also helps staff in several ways, including planning maintenance and other things accordingly.  This also applies to the Wet Processing Room’s benches as well.

In addition, we would like to remind you to notify staff immediately if you notice any issues with equipment or deviance from the standard operating procedures.  Even seemingly small “warnings” on tools are often big clues for staff to troubleshoot, and resolve issues quicker and easier.  And of course this helps us keep the tools up and running well.  In addition to recording the anomaly in the log books, you should also contact staff right away to bring it to our attention ASAP.

Thank You,

Staff

 

 

INRF & BiON Users,

The BiON will be closed this Saturday 6/16/18 for Facilities Managements’ HVAC maintenance.

The INRF will be closed the following Saturday 6/23/18 for FM’s HVAC maintenance as well.

STAFF

Reminder to all users,
Please remember that users may NOT change equipment parameters or any other recipe parameters other than TIME in the recipes.
Please DO NOT enable/disable other equipment set-points either like He Leak Up Rate interlocks, any equipment pre-set values, or defaults of any kind.  Any user wishing to modify parameters other than just the recipe time MUST receive explicit permission from staff in advance.
Please also do NOT attempt to troubleshoot or repair tools.  If an issue occurs, or if anything doesn’t go according to plan/training/SOP, the only action should be to immediately stop and contact staff for them to respond and take the appropriate action.  It is much more difficult for staff to investigate, troubleshoot, and resolve issues when users have cleared errors/alarms/etc. and/or have begun initial attempts at troubleshooting or investigating thereby modifying or even hiding original symptoms and issues with tools before staff can be privy to them.
Thank You,
-STAFF

Reminder to Wet Process Users,

Please be especially careful when performing work in the wet process areas of the INRF and BiON.

Yesterday we had an incident involving HF, where thankfully only a small spill occurred and thankfully it only spilled onto the deck of the HF bench and the person performing the work was not exposed. It was also good that they followed the proper protocols including wearing proper PPE, had a buddy who was able to assist to help respond immediately and notify staff.

Remember, you must follow all of the proper protocols and have as well as follow an approved SOP. As an additional reminder, any changes or modifications to the existing SOP must first go through the proper approval by staff before ever being allowed to occur in the lab.

-STAFF

INRF Wet Process Users,

The Wet Process Room 2325 work has been completed. This room is now open and available for use once again.

Staff

STS Users,

Due to the unexpected failure of the STS’s UPS, we’re going to take advantage of the downtime as much as possible and have the wet pump sent out for repair now vs. the originally scheduled date of this Friday.

We’re still working better estimate the repair of the UPS, but at this time we estimate the STS to come back online by approximately Wednesday 5/23/18.  By this time, if not sooner, we expect the pump to be repaired and re-installed, the UPS issue to be resolved, and the system validated and back online for use.

-STAFF