Integrated Nanosystems Research Facility

Devices made with Karl Suss MA6 Mask Aligner

SILICON MOLD
Si mold allows lower cost for mass manufacturing of PDMS microfluidics, easier cleaning and longer reusability of the Si master compared to conventional photoresist master.
MIRO SHEAR STRESS SENSOR
SEM scan of a surface micromachined device designed at UCI to measure shear stress on wing surfaces during wind tunnel tests.
FLEXIBLE MICROFLUIDIC MEMBRANES
Demonstration of microfluidic channels system built using UCI technology (shown attached to human forearm).
FLEXIBLE MICROFLUIDIC MEMBRANES
Demonstration of device to measure mass flow in natural gas engines. The piece is micromachined silicon, silicon nitride, and gold.
MICROFLUIDIC CHIP AASSAY DEVICE
Demonstration of device to measure mass flow in natural gas engines. The piece is micromachined silicon, silicon nitride, and gold.
SU-8 MOLD
This is a fabricated SU-8 mold on a silicon wafer used to cast PDMS biochips to study cancer cells.
MICROFLUIDIC BIOCHIP
This is a scanning electron microscope (SEM) image of a microfluidic biochip.