Integrated Nanosystems Research Facility

SU-8 Mold

SU-8 MoldSU-8 MoldThese are fabricated SU-8 molds on a silicon wafer. The molds are used to cast PDMS biochips used to study cancer cells.

Equipment used:

  • Laurell spinner to spin the SU-8 photoresist
  • Hotplate to soft-bake the SU-8 photoresist
  • KS MA6 Mask Aligner to UV expose the SU-8
  • Hotplate to anneal the developed SU-8 mold