Integrated Nanosystems Research Facility


We are offering BiON users free access & equipment usage October 14th from 8AM – 12PM. Make sure you take advantage of this deal.

If this looks like it might fit your needs, please see staff for training.


The SEM is back online! As of now all the equipment is up except the BMR and Plasma Therm because we are waiting for replacement parts.

We will be posting the specs on our new Dektak XT stylus profiler later today.

As a reminder, eye protection is required while working inside the INRF and BION cleanrooms, please have safety glasses and or goggles on at all times. Also, appropriate safety gear is required while working with chemicals in the wet processing rooms. Safety is our number one priority, please let us know if you have any suggestions, questions or concerns.

At the present time we are experiencing problems with the Plasma Therm main PC system. It will not start up. The PC for the BMR is having problems starting up. We will also need to finish up the regen cycle for all the evaporators and sputtering systems. If all goes well the metalization systems will be up by Tuesday.

I have added the staff hours to the side bar for your convenience. If you are unable to locate staff please call the front desk @ x2819 and I can try and help.


  • Just a reminder that there will be a scheduled power outage due to facilities working on the main power distribution from 9 am Saturday until 1 pm Saturday. The outage will affect all office and lab space. All metalization, furnaces & characterization tools will be down for the weekend and possibly part of the following week.
  • The photo resist room is available.  The photo resist bench has been cleaned. Lorell spinner #1 the vacuum interlock switch needs to be replaced. Lorell #2 is operational.
  • Repaired the MA6 pneumatic system.
  • The Hatachi SEM 4700 confirmed the high voltage power supply needs to be repaired. Hoping system will be back online by the end of next week.
  • Trion is back up

EH&S is offering our annual laboratory hands on safety training class on Sept. 19, 20, 21 from 12-4:30.

Lunch is provided from at noon at the EH&S Office followed by a 4 hour training rotation through fire extinguisher training, spill clean-up, biosafety cabinet training, and risk assessment.

Free flame retardant lab coats and safety glasses will be provided at the end of the session. If interested, please contact Rebecca Lally:

Here is a quick rundown:
  • SEM is experiencing high voltage issues. It will need further troulbeshooting to confirm.
  • Gasonics is still operational but the monitor screen needs replaced due to age.
  • Nanospec stand alone monitor stopped functioning. We are looking into upgrading the system so it will function from a Windows base program.
  • We are in the process of disassembling the Laurell photoresist bench to clean and repair vacuum issues.
  • We are in process of replacing diaphragm for the Pneumatic table that the MA6 Mask Aligner sits on.
  • We have received the repaired back up pump for the Trion ICP/TRI and plan to install Friday. Hopefully the system will be back online first part of next week.