Integrated Nanosystems Research Facility


    Cleanroom Summer Courses – August 1 – 5, 2016
    In the summer of 2016 we piloted our course series, Cleanroom Fabrication Processing Techniques through the CHAMP Program under Professor Zuzanna Siwy. The Courses covered How to Build the Inside of Your Smartphone, Photolithography, Metallization, Wet/Dry Etching and Cleanroom Fundamentals. Please subscribe to our INRF Blog for upcoming courses or e-mail us at:

    Cleanroom Fundamentals – April 9 / April 15, 2015
    The INRF and BiON hosted an introductory course on cleanroom fundamentals. The course covered such topics as photolithography, dry and wet etching, dielectric deposition, microscopy and surface measurement, and more. The course will be available on a quarterly basis for our cleanroom users and the UCI campus community. Please subscribe to our INRF Blog for upcoming events or e-mail us at:

    Microfabrication and Metal Plating Technologies Showcase – February 14, 2013
    The International Consortium on Advanced Precision Manufacturing Technology (ICAPMT) led by INRF and the Material Surface Engineering Center at Kanto Gakuin University jointly hosted the event “Empowering electronic, sensor, and biomedical devices with microfabrication and metal plating Technologies” on Thursday 2/14/2013. Researchers presented the latest results from studies and research at the intersection of microfabrication technology, metal plating and polymers sciences that have the potential to improve performance in electronics, sensors, and biomedical devices.

    The ICAPMT was established to develop manufacturing technologies for next generation products.

    Download Company Presentations for: Koto Electric Co.,Ltd | Kantu Gakuin University | Zeonex

    INRF BBQ – September 5, 2012
    The INRF Annual BBQ was held for INRF students, faculty, staff, and commercial users. This event promoted collaboration among cleanroom users for nanotechnology research.

    The Third International Symposium on LifeChips – February 9 – 10, 2012
    The symposium theme this year was “Empowering Human Health with Technology.” The symposium brought together academic investigators, industry leaders, policy makers, and educators from California, the US, and international regions to present and discuss the latest results from studies and research at the intersection of life sciences, physical sciences, health, medicine and technology that can lead to improved human health and well-being. The presentations focused on topics of molecular and cellular biology technology; organ systems and medical devices and health and wellness systems. The symposium was sponsored by the NSF IGERT Program, INRF and Calit2.

    Cleanroom Managers Meeting – July 12, 2011
    This marked the first UC Campus wide cleanroom managers meeting. A total of 8 campuses were represented. The meeting was a great success and the hope is to continue the meeting annually. Thanks to EH&S and UCOP for making it happen!

    Hazmat Drill – July 17, 2008
    In an on-going effort to ensure safety, INRF, EH&S, and the Orange County Fire Department came together to participate in a simulated leak and decontamination