Integrated Nanosystems Research Facility

Video Tutorials & Demos

Sometimes you just need to see something done to understand it. These videos will help you to understand standard procedures to enter the cleanrooms facilities and how to operate the tools safely and properly. You may also view our Youtube channel to view the videos.

Videos marked with a cc icon have captions, and can be turned on at any point in the video by clicking on the icon in the Youtube player.

Entering the cleanrooms

Before entering the cleanrooms, you need to make sure you are prepared to enter safely and properly! Carlos takes you through the standard procedures of entering into the INRF / BiON cleanrooms. Topics covered include logging in, properly and safely putting on your cleanroom suits, and more.

Standard Operating Procedures

Ushio Inc. Photo Bonding System

Trion ICP / RIE Dry Etch

XeF2 Pulsing Etcher

CHA Mark 50 Evaporation

First Nano Furnace

Applied MST MVD 100 cc

Atomic Layer Deposition cc

E-Beam 1 Evaporation
Intro & Loading Procedures

E-Beam 1 Evaporation
Running & Unloading

Karl Suss MA6 Mask Aligner


Supplemental Videos

Introduction to Photolithography cc

Hot Plates & Ovens
Proper Procedures and Safety

Karl Suss MA6 Mask Aligner
Backside & Topside Alignment

STS System DRIE cc
Loading Substrate into Etch Chamber

XeF2 Pulsing Etcher
How to prepare the sample