Integrated Nanosystems Research Facility

 

INRF & BiON Users,

Staff needs to clean up all expired chemicals in the INRF and BiON. We noticed there is a lot of SU-8 expired in particular. Please contact Richard at rschang@uci.edu before next Wednesday November 7, 2018 5pm if you have any questions, comments, concerns, or have a particular need to keep anything. Otherwise staff will dispose all expired chemicals.

STAFF

E-beam 1 and Ion Mill Users,

These tools need a regen very soon, staff plans to take these two tools offline for 3 days starting Monday to take care of the regens. They may take less time but a safe budget is 3 days. If anybody has a need we can work around your process time; please contact staff ASAP if this is the case.

Thanks,

STAFF

BiON Metal Etch RM 1422 Users,

The BiON Metal Etch RM 1422 is now offline. Processes will be moved to INRF RM 2320 and are expected to be available Thursday 10/18/18.

STAFF

INRF & BiON Users,

For those whose processes may be sensitive to humidity, please take note that the humidity levels in both the BiON and INRF are out of tolerance and are real low. They are currently about 10-15% vs. the usual ~60%.

STAFF

INRF Wet Etch RM 2325 Users,

The issues have been resolved and TSS has re-certified the benches of RM2325. This INRF room is back ONLINE again for the usual HF, KOH, and Inorganic Etch processing.

STAFF

BiON Wet Etch Rooms Users,

From Monday Oct 1, 2018 through to Tuesday Oct 16, 2018, the locked wet etch rooms in the BION will be OPEN only from 11am – 5pm . Once we are back to full lab staff on Wed Oct 17, 2018, we will return to regular hours for these rooms. Non wet-etch users of BiON room 1421 can contact Marc Palazzo to arrange any needed access.

STAFF

INRF Wet Etch RM 2325 Users,
The INRF Wet Etch RM 2325 facility air balance is out of tolerance.  The room is currently overly positive, and since this is a safety issue we are keeping the room locked and offline until the issue can be resolved.
STAFF

BiON HF Users,

Staff has relocated all personal items from BiON HF RM 1432 to INRF RM 2325.

STAFF

SPTS Users,

The SPTS is offline for some overdue maintenance work.

STAFF

BiON HF Room 1432 Notice:

All HF processing from now on will occur ONLY in the INRF Room 2325. Keycards to BiON HF RM 1432 have been de-activated.

STAFF