Integrated Nanosystems Research Facility


The INRF Clean Room Facility is a class 1,000/10,000 facility, with class 100 work areas and with all major semiconductor fabrication equipment. It is set up to be used in a multi-user mode. Training, maintenance, and common supplies for all equipment is provided by the INRF. In addition to the clean room, further processing and characterization facilities are available through the individual research labs of UCI faculty affiliated with the INRF. All equipment and instrumentation in the INRF are available to all users (UCI faculty, faculty from other universities, undergraduate and graduate students and off campus users) on a recharge basis. Because of the ease of access to the laboratory, the available and extensive training, and wide variety of equipment and instrumentation, the INRF attracts a diverse group of users.

Download the INRF Lab Layout