Integrated Nanosystems Research Facility
We will let you know when they are back online.
We have new training videos posted on the INRF website. The videos go through standard safety and operating procedures of the INRF and BiON tools. The videos can be found by visiting the INRF homepage at:
and clicking on Video Tutorials & Demos link under the Current Users heading.
Or by visiting the page directly at: https://www.inrf.uci.edu/facility/videos/
More videos will be added soon.
INRF Staff
Everything except for the PECVD will remain functional while they are away.
STS is back up!
The STS is down due to RF Tuner not functioning correctly. Jake will take a look at it tomorrow when he gets in. Hopefully this is quick fix.
- Monday is a Holiday. Both labs will be closed (Super Users will still have access)
- Jake will be off Tuesday & Wednesday.
- Ryan will be off Tuesday.
- The rest of the staff should remain the same.
AB&M UV Flood Exposure System is up. Please check the log book to see the power intensity.
We received the Flow Switch for the Trion and now it just needs to be installed. We will update you when the equipment is up.
UP:
- Ebeam1
- Plasmatherm RIE & PECVD
- STS
- All Furnaces
- All of Lithography
- All Metalization
Note: These have not been benchmarked since the power outage so your results may vary.
DOWN:
- AB&M UV Flood Exposure System Update (Lamp will be here 2/13/14)
- Trion (Flow switch ordered and should be here early next week)
The INRF & BION cleanrooms will be closing down at 4pm this Friday due to the campus wide power shutdown. We expect the labs to be back up late Monday or worst case Tuesday depending on how smoothly everything powers back up. We apologize for any inconvenience.