Integrated Nanosystems Research Facility


  • Ebeam1
  • Plasmatherm RIE & PECVD
  • STS
  • All Furnaces
  • All of Lithography
  • All Metalization

Note: These have not been benchmarked since the power outage so your results may vary.


  • AB&M UV Flood Exposure System Update (Lamp will be here 2/13/14)
  • Trion (Flow switch ordered and should be here early next week)