UP:
- Ebeam1
- Plasmatherm RIE & PECVD
- STS
- All Furnaces
- All of Lithography
- All Metalization
Note: These have not been benchmarked since the power outage so your results may vary.
DOWN:
- AB&M UV Flood Exposure System Update (Lamp will be here 2/13/14)
- Trion (Flow switch ordered and should be here early next week)