Integrated Nanosystems Research Facility

Yesterday we experienced a flood in the first half of the cleanroom due to a break in the chill-water system. Thankfully it happened where none of the critical equipment were located. Facilities is working to clean up the water and bring power back to the cleanroom. Due to the extent of the damage we are expecting the lab to be down for the rest of the week and our hope is to be up and running early next week. We will keep you posted.

In other news, the compressed air system should be operational now (once the power is restored) and parts for the Trion, Mark 50 and Ebeam1 have arrived.

NOTE: BION was unaffected and will remain open.

Due to a flood in the cleanroom the INRF will be closed for the remainder of the day for cleanup. The BION will remain open.

According to Facilities, they will start work on the Compressor this weekend and should have it back up by Wednesday at the latest. We will keep you updated if there are any changes.

Curtailment of power to electrical outlets for construction tie-in of new power circuits. Jake will start shutting down equipment Thursday Night (tomorrow 04/07) and will start bringing them back online Friday after they bring the power back. We will make updates as the tools become available.

Friday April 8, 2016, 5:00am – 8:00am

BION Power Outage

This weekend we experienced that the compressed air system has not been able to run two consecutive days without an alarm.  The alarm we have been experiencing is low oil pressure / discharge temperature and high inter stage temperature. We are working with Facilities and the contractor to address these issues.  This means that quite a few pieces of equipment are still shut down due to the CDA. We share your frustration and apologize for the inconvenience. We will keep you updated.

Last night we experience a compressed air outage and it is currently still down. We are working to find out when it will be back online and will report back ASAP. In the meantime, all tools in the INRF that require compressed air will be down. We apologize for any inconvenience.

Starting tomorrow (3/17) the lab staff will start shutting down the equipment for the INRF Closure/Air Compressor Replacement. The only equipment that will remain functional throughout the replacement will be the Flood Exposure and Spinners. We will start bringing everything back online on the 28th if everything gos as planned. The BION will be unaffected.

The INRF cleanroom will be closed March 18th – 28th in order to replace the buildings air compressor. As you know, we have been experiencing problems with low pressure and oil in the air lines for years now. This should remedy those issues and open up more possibilities for the cleanroom in the future.

The BION will remain open during this time.

NOTE: All compressed air to the Engineering Gateway West wing building will be shut down during this time. This will effect all 3rd floor labs as well.


DI Water has been shutdown today. Users will have will not be able to utilize most Lithography equipment and will not be able to perform chemical processing. We will keep you updated on when this capability will return. If there are any questions please contact Jake Hess.

The water utility shutdown affects industrial cold water, industrial hot water and deionized water.

Scheduled to begin at 5:00 AM, lasting for approximately 12 hours, and ending at approximately 5:00 PM the same day