The HF bench in the BiON did not pass certification and has been tagged out. We will have someone come out and adjust the phoenix valve ASAP. We will post an update as soon as one is available.
Integrated Nanosystems Research Facility
TSS is conducting certification of our wet benches in the BiON. Users will not be able to enter the wet area while they are conducting the certification. We anticipate that they will be done today.
A new training video has been posted to the INRF website. This is an introduction video to photolithography.
You can view the video by visiting the videos page at:
https://www.inrf.uci.edu/facility/videos/
You can also view the video directly on YouTube:
Introduction to Photolithography
http://youtu.be/IF2pDoPBv10
To skip to any portion of the video, refer to the following chapters:
- Introduction
- Laurel Spinner: Logging in & pre-use examination
- Laurel Spinner: Loading a sample
- Laurel Spinner: Programming the spin speeds & running
- Laurel Spinner: Unloading & baking
- Laurel Spinner: Clean up after processing
- Post spinning procedures
- Development of Su-8
- Disposal of waste
You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/
INRF Staff
The INRF & BION will be closed tomorrow (Saturday 05/24) due to facilities work being performed on the air handlers.
Carlos will be offering training on the use of the SU8 Laurell Spinner in the BiON Hot Embossing Room. The trainings will be individual for 15 mins each and will take place next Tuesday between 1 – 2:30. Please contact Alana (anvalenc@uci.edu) to schedule.
The card readers on the wet process doors should be fully operational by Friday afternoon. In order to have access we should have your signed Chemical Usage form and your signed Equipment Training Log. Only qualified users will be allowed entry in those areas (including buddies). All users must scan their card for entry. Please do not let users in the room if they do not have their access card. Failure to comply with the rules may result in possible loss of room or lab privileges.
This week Lifeng will be hosting two demo sessions on chemical wet process.
He will cover:
- Proper operation of the laminar flow hood
- Wast management of reactive chemicals
- Labeling
The Demo’s are scheduled this Wednesday and Thursday from 1:00 – 2:30pm. Each Demo will allow for 6 users. If interested please RSVP to Ryan Smith at sryan@uci.edu.
This week we have two sessions scheduled for wet bench qualification:
Wednesday 11:30 – 1:00PM
Thursday 3:00PM – 4:30PM
If interested, please e-mail Alana Valencia at anvalenc@uci.edu to schedule. We will have a total of 12 time slots available and will be scheduling on a first come first serve basis.
The proxy readers have been installed in the BION wet process rooms however they are still not fully functional. We are waiting to hear from Facilities on when they will be up. In the meantime the doors are locked but staff can let you in if you give them some notice. We will try and have a status update for you later today.
Today proxy readers will be installed in the following BiON wet etch rooms:
1432 HF/BOE etch area
1422 metal etch & solvent clean area
1421 Inorganic cleaning area for RCA1 & RCA2 & Piranha & KOH
There will be no access to the wet process rooms while they are working. Once installed, only those users that have been qualified (training log must be signed) and that have completed the chemical usage form will be authorized to access. Let us know if you have any questions.
The chemical usage form can be downloaded from:
https://www.inrf.uci.edu/wordpress/wp-content/uploads/chemical-usage-form.pdf