Integrated Nanosystems Research Facility

Today proxy readers will be installed  in the following BiON wet etch rooms:

1432 HF/BOE etch area

1422 metal etch & solvent clean area

1421 Inorganic cleaning area for RCA1 & RCA2  & Piranha & KOH

There will be no access to the wet process rooms while they are working. Once installed, only those users that have been qualified (training log must be signed) and that have completed the chemical usage form will be authorized to access. Let us know if you have any questions.

The chemical usage form can be downloaded from: