Integrated Nanosystems Research Facility

A new training video has been posted to the INRF website. This is an introduction video to photolithography.

You can view the video by visiting the videos page at:

You can also view the video directly on YouTube:

Introduction to Photolithography

To skip to any portion of the video, refer to the following chapters:

  1. Introduction
  2. Laurel Spinner: Logging in & pre-use examination
  3. Laurel Spinner: Loading a sample
  4. Laurel Spinner: Programming the spin speeds & running
  5. Laurel Spinner: Unloading & baking
  6. Laurel Spinner: Clean up after processing
  7. Post spinning procedures
  8. Development of Su-8
  9. Disposal of waste

You may also visit the INRF  Youtube Channel for additional training videos.

INRF Staff