Integrated Nanosystems Research Facility

There was some flooding in the BION this morning due to a pipe fitting breaking in the ceiling. It was contained to the back hallway area located past the double doors in back of the cleanroom and none of the lab rooms were effected. The cleanroom will remain open but please take note that facilities will be back there cleaning throughout the day. They have been instructed to stay in the back hallway area but might have to step in the main hallway occasionally. Carry on with your projects at your own risk.

Lithography in the BION will be down all Saturday (9/20) for Facilities work. It will be back up on Sunday.

Dear INRF & BiON Users,

We have now installed the new SPTS DRIE Etcher! For your reference attached is the overview of the tool that summarizes its capabilities, which include glass etching.

In order to ensure that we set up the tool to meet user needs, please e-mail Alana at anvalenc@uci.edu by the end of this week, 9/12/14, if you are interested in using the tool. Also, please explain your process / application.

We will also be coordinating a training / demo with the manufacturer and once scheduled we will inform all users interested in the tool.

SPTS

Download System Overview

View Photo Gallery

Starting at 8 am today (Tuesday) and ending at noon on Wednesday Facilities will be shutting down the Bosch vacuum pumps. Lithography and Hot embossing areas will not be available.

There will be possible power interruptions in rooms 1412 & 1422 today and tomorrow. Facilities is working in the chase next to those rooms.

MA-56, MVD100 & Nanoimprinter back up!

Facilities has finished with their work and the BION is now open.

MA-56 is temporarily back up until we receive a switch that is on order. Once we get the part we will have to take it down again to install it.

The BION will be closed tomorrow morning until approximately 8:30 am to allow Facilities to work on the exhaust system.

The HF bench has been certified by TSS so BION rm 1432 (HF Room) is now open for approved users. Thanks for your patience.