Integrated Nanosystems Research Facility

Last night a user broke a wafer inside the STS chamber.  Jake will have to open the chamber to remove the wafer before system can be back online.

INRF/BION Staff

As a reminder all users are required to record the wet bench activity in the BiON. Yesterday we noticed that two users did not record their activity on the board, which included HF activity. Please be aware that this is a safety requirement and users that do not comply will be in jeopardy of having their access terminated.

Thanks,
INRF/BION Staff

After some testing we are happy to say that the STS System is now back up.

Thanks,
INRF Staff

We have received good news from EH&S and are happy to report that work may resume in the INRF Cleanroom beginning tomorrow, 7/10/13. Based on the report prepared by EORM Consultants we have approval to reinstate use of our fume hoods for specific processes. This includes lithography, electroplating, dry etch and metalization processes. All other processes not mentioned, such as wet etch, have been transferred to the BiON Cleanroom and will remain here until the permanent fix for the INRF ventilation system is completed.

One fume hood in room W2332 (TSS#86187, Negative Photo resist) was not approved as it does not meet the minimum flow rate requirement of 100 fpm.
EH&S has placed a work order with Facilities Management to correct this deficiency. Work may not resume in this fume hood until after the issue is corrected.

For further information, please review the report prepared by EORM. If you have questions regarding your specific process, please e-mail us at: info@inrf.uci.edu.

UCI Fumehood Assessment

Thanks,
INRF Staff

Jake Hes will be out of the office on Friday (July 5) and Monday (July 8).

HF Room in Bion is also closed until Tuesday (July 9) at 11am.

INRF Staff

The MSDS book for the BION is now kept in rm. 1322A under the cleaning table for your convenience. We ask that you please not remove any MSDS sheets.

Thanks,
INRF Staff

We are converting the INRF key card reader system this week. If you experience any issues with your card key, please come to the main office and we will let you in the cleanroom.

Thanks,
INRF Staff

Jake, Lifeng and Vu will be out today. Mo should be in around 12.

Note: Due to a staff shortage, all cleanroom/foundry appointments should be scheduled with staff via email.

Thanks,
INRF Staff

Jake will be out today (6/21/13) and Monday. There will be no wet processing in the BION for both of those days. Sorry for any inconvenience.

Thanks,
INRF Staff

Today the School of Engineering is hosting the Staff Recognition luncheon at The University Club at 11:30AM to honor staff members. Therefore the INRF Office will be closed today during the lunch hour between 11:30AM to 1:00PM.