Integrated Nanosystems Research Facility

STS plasma therm RIE & PECVD & low temperature BMR oxide and Nitrite systems are all off line due to our CDO (polution control device) that is required to be in operation while operating these tools experienced a high temperature alarm on the exhaust. While looking into this problem we noticed the reactive gases are eroding internal components. These components must be replaced. There is a good chance the systems will be back online this weekend.

Ion Milling system experienced a chamber vacuum leak and also the neutraliser wire needs to be replaced. At the present time we are using a leak detector to locate and verify the leak.
System should be back online by Monday.

ALD has been disassembled and the chamber and vacuum components to be sent out to be bead blasted. System should be back by Tuesday and we will be reassembled on Wednesday.

Gasonics experienced a faulty replacement part. We received the new part and has been installed but needs to be electronically set up. We hope to have the system up by this weekend.

Hitachi SEM baked out system for last three days. We are replacing the apature and realigning the beam. If all goes well the system should be back up by Thursday evening or Friday.

A Nano imprinter user was using the system Wednesday and noticed oil in the vacuum foreline. The system is tagged out temporily while I clean the foreline. It should be back online by Friday.

Saftey and Observation note.
USERS NEED TO BE MORE CONSCIENTIOUS ABOUT CLOSING WASTE CONTAINERS AFTER COMPLETION OF USING THE CONTAINERS. VERIFY THAT THE STORAGE CONTAINERS ARE FOR REACTIVE MATERIALS, SUCH AS SOLVENT AND ACIDS, AND THEY ARE THE PROPER CONTAINERS AND PROPERLY IDENTIFIED.

We observed while inspecting the lab in the evenings that users are leaving the microscope light on at high intensity. This creates more work for staff replacing lamps. If users do not know how to operate the microscopes properly please contact staff. We also noticed the stage locks being over tightened. Users are forcing the stage up and down which damages the microscope.
Your help in this area would be appreciated.

Thanks,
INRF Staff

I’ve attached a link to our new training log for the INRF & BiON labs. When getting trained or re-certified on a piece of equipment please print this out, have it signed and bring it to Ryan Smith in the front office to update your access and place it in your file. Once you have this in your file you will schedule your future training with staff and come by Ryan’s desk to get your sheet to get signed off. some of you are already familiar with this. If you have any questions please contact Ryan: sryan@uci.edu.

Thanks!

INRF Equipment Training Log

• STS ICP is down due to a communication error. We’ve contacted STS and are waiting to hear back from them. The problem seems to be a bad module that will not communicate with the main PC.
• Replaced the UPS system on the Cannon Stepper. System is now working within normal perimeters.
• Finished repairing the CHA Evaporator Cryo Compressor and regenerated the system. Will do a dummy in the next day or so.
• Allocated time to the FEI E-beam writing system. Reconfigured the computer cables so system is being checked out to see if the Nabady software will communicate with the stage.
• The Gasonics asher is back online. The end of point error was corrected and is working within normal perimeters.
• BMR Nitrite Oxide system, the gas manifold needs cleaned due to deposition being ununiformed and deposition rate has dropped.

A couple updates:

• The STS system back on line and working fine.
• We have not been able to get back to the CHA thermal evaporator.
• EH&S has continued performing their annual hood inspection.
• Gasonics system back online.
• E-bean 1 evaporator went down due to operator error. Regened system Saturday, staff will check out system on Monday and should it be available.

Thanks,
INRF Staff

• STS tool down due to broken wafer inside the reactive chamber. Users need to pay attention to how often they use the same carrier wafer and inspect for chips or cracks before starting the process.
• Need to replace the light source on the Rudolph Ellipsometer.
• EH&S has an outside company performing annual inspection on all chemical hoods in INRF and BiON for the next few days.
• CHA thermal evaporator is down. In the process of replacing the Cryo compresssor condenser fan.
• BiON chemical wet etch exhaust is malfunctioning. Phoenix valve not working properly. Check with staff for details.

Thanks,
INRF Staff

• The STS is back to normal.

• The Canon was experiencing some problems with the optical sensors for the prealigner and had to be re-calibrated. It is now back up and running.

• The Dektak 3 in the BiON is still down. We need to replace some electronic components and suggest using the alpha Step as a backup.

Thanks,
INRF Staff

We had an issue with the E-beam evaporator. The auto track that controls the valve function had an issue which got repaired but you will still notice a delay when opening the high vac. I believe the valve needs replaced. If it becomes a big problem notify staff.

We experienced problems with the CDA (clean compressed air) which started last Thursday. By midday the system dropped down to 80 psi. It affected the STS and Cannon stepper. Talked to facilities they had to rebuild the heads on the compressor. I believe this has been accomplished last Wednesday. Everything should be back to normal. If you experience problems let staff know.

We lost the dry pump on the ALD system. Jake is in the process of removing it and sending it out for repair. Looking for turnaround time to be 4 working days.

We have ordered the XeF2 and should have that shortly.

In the BiON on the Decktac 3, users were experiencing that the operating system would shut down and needed to be restarted. It would work for a short while and then shut down again. The back up got reinstalled into the system and so far it looks like the tool is functioning properly. Let staff know if you are experiencing any problems.

We are in the process of getting a new cylinder and will try and have it back up ASAP. We will keep you updated.

Thanks!

The STS & XeF2 are back up and running.

Thanks,

INRF Staff

Everything is back up.

From Jake:

“Last night we had a water leak on the wet bench next to the EHC bench that RF Nano uses.  The domestic water is turned off until I get the bench deconed and the leak repaired.  The domestic water also supports the water to the CDO.  We can not run the Plasma therm, STS and BMR systems.  I have them tagged out at this present time.”

I will try and get an update later today when things are back online.

Thanks,
INRF Staff