Integrated Nanosystems Research Facility

  • The STS is back to normal.
  • The Canon was experiencing some problems with the optical sensors for the prealigner and had to be re-calibrated. It is now back up and running.
  • The Dektak 3 in the BiON is still down. We need to replace some electronic components and suggest using the alpha Step as a backup.

Thanks,
INRF Staff