Integrated Nanosystems Research Facility

A couple updates:

  • The STS system back on line and working fine.
  • We have not been able to get back to the CHA thermal evaporator.
  • EH&S has continued performing their annual hood inspection.
  • Gasonics system back online.
  • E-bean 1 evaporator went down due to operator error. Regened system Saturday, staff will check out system on Monday and should it be available.

INRF Staff