Integrated Nanosystems Research Facility

Here is just a quick rundown:

STS and E-beam Evap are up.

SEM, Trion, Sputtering Systems, MA6 are down.

I will try and get more details ASAP.

Thanks,
INRF Staff

Please come to todays meeting in rm 3311 to get the latest equipment status. We would like to appologize that there haven’t been many equipment blog updates and we are working to correct that.

Thanks,
INRF Staff

• As a reminder the facility will experience a power shut down by Facilities on Oct 6th from 8am – 5pm. This will impact all the equipment within the INRF facility. The equipment will have to be started up again and we will do our best to have it up by Monday.
• The Chill water upgrade that supports the thermal evaporator, STS, Plasma therm – the plumbing and filter reconfiguration has been completed.
• Unfortunately the recirculating pump is too small to support all three tools at the same time and will have to be replaced. At the present time the Plasma therm and Thermal evaporator are back online.
• STS-ICP will remain off line until the new pump is installed on the chill water system. We are also in the process of replacing the low conductivity pump that supports the RF system.
• ION milling – We performed a test run on the system Wednesday evening and are still experiencing problems with emission current. The problems seem to be located in the power supply. We will continue looking into the problem as time allows.

Thanks,
INRF Staff

Equipment:

• E-beam is finished. The staff is using it to catch up on foundry work and it will be available Monday for users. We still need to dissemble and clean the emitter and we plan to purchase a replacement so we have one in stock to minimize down time.
• Thermal evaporator is back online. Bill Tang’s group will be using it to deposit Ti.
• We are planning to address the chill water system with the STS starting Monday. This will impact the Thermal Evaporator, STS and Plasma Therm. To revamp the existing chill water it will take five working days.
• The replacement lamp for the Flood Exposure in the BiON came in yesterday and will be replaced this afternoon. The system should be up and running later today.

Thanks,
INRF Staff

The STS is still experiencing high temperature for the dry pump and also a circulation issue with the chiller that supports the RF network. To correct the dry pump water issue we will have to replace the existing copper lines due to build-up. We have no estimated completion date at this time.

Thanks,
INRF Staff

• The annual maintenance on the DI water systems for both INRF and BiON was completed. The maintenance consisted of treating the system with chlorine and an inhibitor to remove any bacteria. We confirmed the resistivity was back to 17 megohm in INRF but we still need to verify the BiON. The BiON should be useable Friday.
• The STS is experiencing chill water issues for the dry mechanical pump. The pump tripped out on high temperature. We need to disassemble the chill water line to decontaminate to get operating temperatures back to normal. It should be ready by Monday.
• E-beam evaporator: The high vac was disassembled, cleaned and O rings replace. High vac valve is opening and closing normally. We just received the chamber shrouding from the cleaning company. We need to finish cleaning the shutter actuator, reassemble, then re-gen the cryo pump. Possibly ready by Tuesday.
• XeF2 pulse etcher chamber has been cleaned. We need to reconnect the pumping line to the chamber and verify the system is operating within normal parameters. It should be ready by Friday.
• ION milling: We are verifying interconnections in the gun. We’ve identified one bad connection leading to the chamber feed through connector. The connector needs to be repaired.
• Oriel flood exposure still working on high voltage power supply.
• MA56 mercury lamp needs to be replaced and should be ready by Friday.
• AB&M flood exposure mercury lamp needs to be replaced. We expect it to be back online by Friday.

Thanks,
INRF Staff

Equipment:

• Facilities is going to perform a sanitation and cleaning procedure in the DI water system Wednesday, September 5th @ 6 am. This procedure will take three days and water will not be available until September 10th.
• The E-Beam evaporator is still being worked on and we have sent out various components for bead blasting. The items were picked up Tuesday and they need three working days to clean. The system should be back online by September 10th.
• Oriel UV Flood exposure is being looked at. We have ordered some replacement components in the high voltage portion of the system. We are waiting to receive those parts.
• K&S 780 dicing saw is back online.

Note:
Wet bench area – Due to the exessive amout of users using the wet etch area, users have requested reserving time to use the benches. The idea is to mount a white board in the robing area for users to reserve certain benches at specific times. Hopefully this will reduce the congestion and make a safer environment. If you have any questions please ask staff.

Thanks,
INRF Staff

Equipment Updates:

• The E-beam 1 experienced a high voltage problem on start up. The high voltage circuit needs to be repaired due to excessive amount of material deposited inside the chamber. We will clean the system, repair the damaged circuitry, disassemble and correct the high vacuum valve so it will open and close without hesitation. We are hoping the system will be available sometime next week.
• The Nanoimprinter back on-line. We drained the oil out of the foreline.
• We are expecting the CCD camera for the K&S 780 dicing saw shortly and the system should be back up by Wednesday.
• Oreol Flood exposure is still down and we did not have a chance to look at the power supply.
• The Karl Suess MA-6 is experiencing problem on channel two. The system is presently set at 5 milliwatts. If using system at 10 milliwatts you will need to double your exposure time. Jake will try to look at this system this weekend.
• The Critical point dryer received the O rings and we are planning a test run before the end of the week. Check website to verify system is back online.

Thanks,
INRF Staff

• We are still experiencing problems with the K&S 780 dicing saw. We will be sending the camera system and mixing box out for evaluation and repair. We should have it back sometime next week.
• Still working on the critical point dryer and talking with their service department to determine why its consistently leaking CO2.
• The Oreole flood exposure is still experiencing a power supply problem.
• We’ve completed the ALD system and are planning a test run before the end of the week.
• Tested out wet oxidation system. A short in gas panel has been repaired and the system is working again.
• Worked on IM milling, replaced the emissions element and are planning a test run to verify system is operating properly.

Safety Topic:
We experienced an incident Tuesday afternoon. A user may have been exposed to HF due to another user improperly blowing dry an object outside the safety hood.
Users are reminded: Any work within the acid rooms should be performed inside the hood and directed away from yourself and others. If a user is not sure of a procedure, contact staff before proceeding. Users be aware, if involved in any safety incident to notify staff immediately no matter how small so we can take action.

Thanks,
INRF Staff

Finished repairing the CDO this weekend. Due to that repair the STS, Plasma therm and BMR low temp PECVD are back online.

Finished repairs on Hitachi SEM. This system is back online.

We worked on the IM milling, identified a vacuum leak and also replaced the neturalization filament. We are still experiencing problems with the emmision current. We will be addressing that.

Experiencing a problem with the critical point dryer. It is leaking at high pressure. We plan to replace the two retaining rings on the chamber.

We were informed Wednesday that the flood exposure in the INRF UV lamp was not functioning. We recommend if you have a need at this time you utilize the flood exposure in the BiON.

The Thermco 4″ Anneal furnace was contaminated with debris. Furnace tube has been cleaned and is back online.

Information:
Users please use the blog to find out status of lab equipment. As equipment comes back online there are two areas to review for status, our website or the blog. We will updating the blog as equipment is back online real time.

Thank you for your patiences.
INRF Staff