Integrated Nanosystems Research Facility

A new training video on the ABM UV Flood Exposure System has been posted to the INRF website. You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:
https://youtu.be/WRDHDB1XvC0

You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

Two new training videos on the XeF2 Pulsing Etcher have been posted to the INRF website. You can view the videos by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the videos directly on YouTube:

XeF2 Pulsing Etcher – Standard Operating Procedures
https://youtu.be/vlL-X3XG00s

XeF2 Pulsing Etcher – How to prepare the sample
https://youtu.be/sHDcSwnewpw

You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

The Ebeam 1 is now back online. Thank you for your patience.

INRF Staff

A new training video on the CHA Mark 50 Evaporation has been posted to the INRF website. You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:
https://youtu.be/5K7DhrbEVaQ

You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

A new training video on the First Nano Furnace (EasyTube 3000 System) has been posted to the INRF website. You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:
http://youtu.be/64ws-2lQYDs

You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

Two new training videos have been posted to the INRF website. You can view the videos by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the videos directly on YouTube:

Introduction & Loading Procedures
http://youtu.be/T2FXGL-d0sQ

Running & Unloading
http://youtu.be/cpwMZ8cIhVU

You may also visit the INRF  Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

A new training video has been posted to the INRF website. This is an introduction video to photolithography.

You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:

Introduction to Photolithography
http://youtu.be/IF2pDoPBv10

To skip to any portion of the video, refer to the following chapters:

1. Introduction
2. Laurel Spinner: Logging in & pre-use examination
3. Laurel Spinner: Loading a sample
4. Laurel Spinner: Programming the spin speeds & running
5. Laurel Spinner: Unloading & baking
6. Laurel Spinner: Clean up after processing
7. Post spinning procedures
8. Development of Su-8
9. Disposal of waste

You may also visit the INRF  Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

A new training video on the Atomic Layer Deposition (ALD) System has been posted to the INRF website. You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:
http://youtu.be/x-YRl0U_u2c

You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

A new training video has been posted to the INRF website. The training video covers Backside and Topside Alignment using the Karl Suss MA6 Mask Aligner tool.

You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:

Karl Suss MA6 – Backside and Topside Alignment
http://youtu.be/-yZgxPg0FFs

You may also visit the INRF  Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

Two new training videos on the STS System DRIE have been posted to the INRF website. You can view the videos by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the videos directly on YouTube:

STS System DRIE – Standard Operating Procedures
http://youtu.be/kj_UYQ3HAoo

STS System DRIE – Loading Substrate into the Etch Chamber
http://youtu.be/onEpizpBAkI

INRF Staff