Integrated Nanosystems Research Facility

 

Good morning everyone,
Here is an update on the exhaust issue for the Laminar Flow chemical benches.

I met with facilities today and we went up above the ceiling to look at the ventilation exhaust system so they can get a better understanding of what needs to be done.
They are planning on getting an engineering firm under contract to evaluate our system. I also had a discussion with EH&S today. I am providing them with the mfg. and some information on our existing Laminar flow chemical wet benches. EH&S will then arrange a meeting with TSS this week to consult with them to resolve the exhaust issue.

Until further notice EH&S advises we do not do any processing on our benches in the INRF. In the meantime we can perform various preapproved processes on our benches within the BION facility.

No HF processes should be performed in the chemical wet etch bench in the BION until further notice.

Thanks,
Jake

From EH&S:

“EH&S has been in discussions with FM (Facilities Management) regarding the clean room ventilation system. We feel that further investigation (with FM HVAC , Jake and EH&S) into potential causes for the recent chemical containment issue are necessary in order to have a better understanding of what occurred and to have sufficient confidence in the system before releasing the hoods for HF use. At this time, HF should not be used until further notice. FM HVAC , Jake and EH&S will be working together to resolve this issue safely as soon as possible.”

So as of now, all our benches will be shut sown until we figure out the ventilation issue. We will let you know as soon as possible when they are back up. Sorry for the inconvenience.

Thanks,
INRF Staff

All of the benches are now back online.

Thanks,
INRF Staff

Hello,

There is some work being performed on the roof of CaliT that could effect the exhaust in the BION. If using the hoods, please pay special attention to the exhaust alarms.

Thanks,
INRF Staff

Hello,

We have recently added a new feature to the INRF website that will include a Facilities Maintenance Calender for upcoming building maintenance/HVAC shutdowns & Fire alarm testing. You can see it on the right hand side of the page listed below.

https://www.inrf.uci.edu/facility/equipment/status/
Thanks,
INRF Staff