Integrated Nanosystems Research Facility

 

Participation is appreciated :-)

“On 5/31 around 3:30 pm we will have a photographer visiting our cleanroom to take photo’s. The photo shoot is taking place at various locations within the School of Engineering for the school wide brochure. Just a heads up.”

Please check with staff to schedule time.

On Thursday, May 19 we had a user try to cure some material on a substrate in
the high temperature inert oven. The material had a low VOC level which
filled the lab with discomfortable odors. We decided to close the lab for a short period to air out the facilities.

We disassembled and reassembled the gun for the E-beam evaporator. We were not able
to get the water leak repaired and we will have to disassemble it and try to
identify where the leak is. We will try to get it repaired sometime this week.

On 5/31 around 3:30 pm we will have a photographer visiting our cleanroom to take photo’s. The photo shoot is taking place at various locations within the School of Engineering for the school wide brochure. Just a heads up.

Be safe my friends!

Santa Rosa engineer suffered severe burns on his face and upper torso in a chemical explosion at Agilent Technologies’ Santa Rosa campus

The e-beam gun was definitely damaged by being overheated therefore creating a water leak verified last evening with my leak detector. The gun will need to be removed and rebuilt. We are looking at least a week.

Jake

As you know we had a power outage either Sunday evening or Monday morning
which impacted the Cannon stepper, MAC50 E-beam evaporator, BMR PECVD, Trion and some of the characterization equipment. These items are all back on-line except the MAC50. It is currently experiencing cryo regeneration problems.

E-Beam evaporator is down due to a user over driving the e-beam power supply, not sweeping the beam properly, burning through the crucible creating a water leak within the gun. We dont have a completion date at this time.

STS is down due to another vacuum leak where the turbo pump flange meets
up to the high vac valve. Parts are scheduled to be in Wednesday afternoon. Tool should be up online by the end of the week.

BiON:

Shut down the MA flood exposure in the Bion lab for maintenance to replace mercury lamp.

Shut down Oriole flood exposure for maintenance to replace mercury lamp.