Integrated Nanosystems Research Facility

INRF / BiON Devices

The INRF and BiON clean rooms utilize state of the art tools for performing manufacturing at very small size scales. Many of the techniques are borrowed from the semiconductor industry and adapted for making biomedical devices. The INRF/BiON facilities have unique tools for performing precision work in polymers, including wet lithography, laser etching, hot embossing, electroless metal deposition, surface modifications. In addition, our researchers have developed specialized materials and processes that are useful for micro biomedical devices, such as biocompatible photostructural polymers, protein patterning techniques, and laminate assembly.

Below are examples of devices made in the INRF/BiON cleanrooms using our equipment.


View devices made with
AB&M UV Flood Exposure System

View Dektak 3 Profilometer applications in devices’ fabrication

View Dektak XT Profilometer applications in devices’ fabrication

View devices made with
E-Beam 1 Evaporation

View HS200 Confocal Microscope applications in devices’ fabrication

View devices made with
Karl Suss MA6 Mask Aligner

View devices made with
Laurell Photoresist Spinner

View SEM Hitachi S4700 / EDAX applications in devices’ fabrication

View devices made with
SPTS APS PM

View devices made with
STS System DRIE