Integrated Nanosystems Research Facility


Dear INRF & BiON Users,

We have now installed the new SPTS DRIE Etcher! For your reference attached is the overview of the tool that summarizes its capabilities, which include glass etching.

In order to ensure that we set up the tool to meet user needs, please e-mail Alana at by the end of this week, 9/12/14, if you are interested in using the tool. Also, please explain your process / application.

We will also be coordinating a training / demo with the manufacturer and once scheduled we will inform all users interested in the tool.


Download System Overview

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Last night a user broke a wafer inside the STS chamber.  Jake will have to open the chamber to remove the wafer before system can be back online.