Integrated Nanosystems Research Facility

This is a reminder for those who have signed up for the Lithography workshop today at 2pm with Dexter Humphrey. Please meet in the INRF lobby and we will have a sign-in sheet at the front desk.

NOTE: Today’s workshop is currently full but we will be excepting standbys if there are any cancellations or no-shows.

It looks like the install of the new compressor for the Engineering Gateway/INRF was a success. This week we will start to bring the tools back online.

Here’s the rundown:

• STS: Needs a new DI recirculating pump. We should have that switched out shortly.
• Trion: We are waiting for the pressure control valve to come back from repair from MKS.
• Ebeam 1: We will be doing a regen and we are waiting for the chamber hardware to come back from cleaning. These parts should be back this week.
• MA6:  We need to start up and check out the system.

We will send out a notice as the tools come up. Thanks for your patience

• Friday, March 25th is a campus Holiday (Cesar Chavez Day)
• The INRF and BION cleanrooms will remain open throughout the Holiday break. The INRF wont be fully functional until next week.
• All the tools will be accessible for those with access to them however HF (rm 1432) & Inorganic (rm 1421) rooms will be closed.
• INRF Office will be closed and lab staff will be off during this time.
• If you plan on using the lab and don’t have 24hr access, please contact Dexter or Richard.
• Please contact Jake via cell/text immediately if you have any issues with the tools or other emergencies. (Do not email your issue!)

Jake will be holding his weekly User Meeting tomorrow at 1:30 pm in EG rm 3311. He will be going over the cleanroom and equipment status

INRF and BiON are going to be offering three different workshops: Lithography, Metal Deposition and Reactive Ion Etching. The purpose of these workshops is to give you more familiarity with the tools and their capabilities and to give you the best end result that the tool is able to perform to. These workshops will consist of some lectures but mostly hands on.

You need to register and need to be a INRF or BiON user in order to attend the following workshops.

The workshops are filling up quickly! If you are interested, please sign up as space is limited!

REGISTER NOW

For all upcoming workshops, you may view our Workshop Events Calendar.

For any questions, contact Dexter Humphrey at dexterh@uci.edu.

Details

Workshop Flyer

Diamond Scribes ($14) and Wafer Carriers ($8) are back in stock in the INRF Store

Jake will be off campus March 15th and will be back in the lab March 19th.

Please direct any lab issues or questions pertaining to the lab to Dexter Humphrey (973) 931-0893 or dexterh@uci.edu.

Jake will be off campus March 15th and will be back in the lab March 19th.

Please direct any lab issues or questions pertaining to the lab to Dexter Humphrey dexterh@uci.edu.

INRF and BiON are going to be offering three different workshops: Lithography, Metal Deposition and Reactive Ion Etching. The purpose of these workshops is to give you more familiarity with the tools and their capabilities and to give you the best end result that the tool is able to perform to. These workshops will consist of some lectures but mostly hands on.

You need to register and need to be a INRF or BiON user in order to attend the following workshops.

REGISTER NOW

For all upcoming workshops, you may view our Workshop Events Calendar.

For any questions, contact Dexter Humphrey at dexterh@uci.edu.

Details

Workshop Flyer

• Monday, February 15th is a campus Holiday (Presidents’ Day)
• The INRF and BION cleanrooms will remain open throughout the Holiday break.
• All the tools will be accessible for those with access to them however HF (rm 1432) & Inorganic (rm 1421) rooms will be closed.
• INRF Office will be closed and lab staff will be off during this time.
• If you plan on using the lab and don’t have 24hr access, please contact Dexter or Richard.
• Please contact Jake via cell/text immediately if you have any issues with the tools or other emergencies. (Do not email your issue!)