Integrated Nanosystems Research Facility

Due to the reduction in lab staff hours, equipment training will be held regularly on a weekly basis on Wednesday’s. Please see Ryan to sign up for the next equipment training on July 24th. Please keep in mind that we are not able to provide training on equipment that is currently offline. You may check the status of equipment by visiting https://www.inrf.uci.edu/facility/equipment/status/.

After some testing we are happy to say that the STS System is now back up.

Thanks,
INRF Staff

We have received good news from EH&S and are happy to report that work may resume in the INRF Cleanroom beginning tomorrow, 7/10/13. Based on the report prepared by EORM Consultants we have approval to reinstate use of our fume hoods for specific processes. This includes lithography, electroplating, dry etch and metalization processes. All other processes not mentioned, such as wet etch, have been transferred to the BiON Cleanroom and will remain here until the permanent fix for the INRF ventilation system is completed.

One fume hood in room W2332 (TSS#86187, Negative Photo resist) was not approved as it does not meet the minimum flow rate requirement of 100 fpm.
EH&S has placed a work order with Facilities Management to correct this deficiency. Work may not resume in this fume hood until after the issue is corrected.

For further information, please review the report prepared by EORM. If you have questions regarding your specific process, please e-mail us at: info@inrf.uci.edu.

UCI Fumehood Assessment

Thanks,
INRF Staff

All of the benches are now back online.

Thanks,
INRF Staff

Just a heads up that the AB&M UV Flood exposure system will be going offline for maintenance soon. We do not have an exact date of when the equipment will be down so if you need it please plan on using it soon.

Thanks,
INRF Staff

David will be giving training on the MA6 tomorrow (1/10/13) in the INRF from 2-4pm. If you are interested, please meet in the cleanroom by the tool and bring a notebook.

Thanks,
INRF Staff

STS is down due to communication error. Software reset was not able to fix the issue.
Jake will look into this tomorrow when he comes in.

Thanks,
INRF Staff

Hello,

David Crosley will be conducting training on the E-Beam 1 tomorrow from 12pm – 4pm. Please email David at dcrosley@uci.edu if you are interested.

Hope to see you there.

Thanks,
INRF Staff