Integrated Nanosystems Research Facility


Dear INRF & BiON Users,

We have now installed the new SPTS DRIE Etcher! For your reference attached is the overview of the tool that summarizes its capabilities, which include glass etching.

In order to ensure that we set up the tool to meet user needs, please e-mail Alana at by the end of this week, 9/12/14, if you are interested in using the tool. Also, please explain your process / application.

We will also be coordinating a training / demo with the manufacturer and once scheduled we will inform all users interested in the tool.


Download System Overview

View Photo Gallery

We have new training videos posted on the INRF website. The videos go through standard safety and operating procedures of the INRF and BiON tools. The videos can be found by visiting the INRF homepage at:

and clicking on Video Tutorials & Demos link under the Current Users heading.

Or by visiting the page directly at:

More videos will be added soon.

INRF Staff