Integrated Nanosystems Research Facility

MA-56 is temporarily back up until we receive a switch that is on order. Once we get the part we will have to take it down again to install it.

HF Bench is still down. We have done all we can do and it is now in Facilities and EH&S’s court. We were hoping it would be done Monday but that looks like it wont happen. We’ll post once we find out more info.

Dicing Saw is back up.

The pump for the Nano imprinter has been sent out for repair and we should be getting that back shortly.

The power supply for the MA-56 is back in but due to various other projects it will be a little while longer before Jake can get that hooked up.

The new pump was installed successfully however we needed to order some replacement filters and expect them by mid next week.

A new training video has been posted to the INRF website. This is an introduction video to photolithography.

You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:

Introduction to Photolithography
http://youtu.be/IF2pDoPBv10

To skip to any portion of the video, refer to the following chapters:

1. Introduction
2. Laurel Spinner: Logging in & pre-use examination
3. Laurel Spinner: Loading a sample
4. Laurel Spinner: Programming the spin speeds & running
5. Laurel Spinner: Unloading & baking
6. Laurel Spinner: Clean up after processing
7. Post spinning procedures
8. Development of Su-8
9. Disposal of waste

You may also visit the INRF  Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

The SEM is back up.

A new training video on the Atomic Layer Deposition (ALD) System has been posted to the INRF website. You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:
http://youtu.be/x-YRl0U_u2c

You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

The SU-8 spinner is now installed and available to use! Please just verify the level before applying SU-8.

The SEM is back up. All users who had access will need to get re-certified as there hes been some changes to standard operating procedure.