Integrated Nanosystems Research Facility

 

Reminder to all users,
Please remember that users may NOT change equipment parameters or any other recipe parameters other than TIME in the recipes.
Please DO NOT enable/disable other equipment set-points either like He Leak Up Rate interlocks, any equipment pre-set values, or defaults of any kind.  Any user wishing to modify parameters other than just the recipe time MUST receive explicit permission from staff in advance.
Please also do NOT attempt to troubleshoot or repair tools.  If an issue occurs, or if anything doesn’t go according to plan/training/SOP, the only action should be to immediately stop and contact staff for them to respond and take the appropriate action.  It is much more difficult for staff to investigate, troubleshoot, and resolve issues when users have cleared errors/alarms/etc. and/or have begun initial attempts at troubleshooting or investigating thereby modifying or even hiding original symptoms and issues with tools before staff can be privy to them.
Thank You,
-STAFF

Reminder to Wet Process Users,

Please be especially careful when performing work in the wet process areas of the INRF and BiON.

Yesterday we had an incident involving HF, where thankfully only a small spill occurred and thankfully it only spilled onto the deck of the HF bench and the person performing the work was not exposed. It was also good that they followed the proper protocols including wearing proper PPE, had a buddy who was able to assist to help respond immediately and notify staff.

Remember, you must follow all of the proper protocols and have as well as follow an approved SOP. As an additional reminder, any changes or modifications to the existing SOP must first go through the proper approval by staff before ever being allowed to occur in the lab.

-STAFF

INRF Wet Process Users,

The Wet Process Room 2325 work has been completed. This room is now open and available for use once again.

Staff

STS Users,

Due to the unexpected failure of the STS’s UPS, we’re going to take advantage of the downtime as much as possible and have the wet pump sent out for repair now vs. the originally scheduled date of this Friday.

We’re still working better estimate the repair of the UPS, but at this time we estimate the STS to come back online by approximately Wednesday 5/23/18.  By this time, if not sooner, we expect the pump to be repaired and re-installed, the UPS issue to be resolved, and the system validated and back online for use.

-STAFF

INRF Users,

The electrical work originally planned for Tues May 15th has been re-scheduled to be performed Monday 5/21/18.

Reminder: There will be some electrical work for RM 2315 and as such this room, as well as potentially several adjacent rooms, will lose electrical power.

The STS, and the Hesse Wirebonder will definitely lose power and so will be offline this Monday 5/21/18 day. Other tools in other nearby rooms on that side of the cleanroom may very likely be affected and offline also.

Please plan accordingly,

STAFF

INRF Wet Process Users,

INRF’s RM 23225 and 2320 (wet processing rooms) will be taken offline for several hours starting approximately 12pm noon on Wednesday, May 16, 2018.  There will be some work performed on the door entries, and Facilities Management has estimated the job to take 3-4 hours if all goes well, and they estimate the work to be performed starting at 12pm noon.  They could not give concrete times rather best estimates.

Please plan accordingly.

STAFF

INRF Users,

On Tuesday 5/15/18, there will be some electrical work for RM 2315 and as such this room, as well as potentially several adjacent rooms will lose electrical power.

The STS, and the Hesse Wirebonder will definitely lose power and so will be offline this day.  Other tools in other nearby rooms on that side of the cleanroom may very likely be affected and offline also.

Please plan accordingly,

STAFF

STS Users,

As a reminder to our blog post from May 3, 2018, the STS will be down for 1 week as the wet pump is sent out for repair.  The tool will be offline from Fri May 18th – Fri May 25th , 2018 as shown on the Forged calendar.

Please plan accordingly.

Thanks,

STAFF

STS Users,

The STS’s wet mechanical pump is in much need of a PM as soon as possible. It will take the STS offline for 1 week.  We are planning to do this the week of May 23, 2018 or May 30, 2018.  Please plan accordingly and contact staff ASAP if any concern.

Thanks,

STAFF

INRF Users,

It appears Facilities Management corrected their issue with our lab compressed air. The system is back ONLINE allowing us to resume normal operation now that tools can are back online as well.

FYI, This includes the STS!

-STAFF