Integrated Nanosystems Research Facility

STS Users,

Staff won’t be able to get a chance to get to the STS PM in the next couple of days, so the STS won’t be offline for 2 days for a PM in the near term.

Please continue to alert staff if any issues arise during the use of the tool and please continue to keep the load lock under vacuum for as much as possible (minimize the time you load a wafer at atmosphere).

We’ll update again when we have a better idea when.