Integrated Nanosystems Research Facility

Just want to inform you that the STS ICP is back online.  We had to repair
three leaks within the system.  One in the lower RF network, the other two
around the high vac valve that seperate the chamber and the turbo pump.
Vu, one of our staff members performed some benchmark testing to comfirm
the etch rate is back to normal.
Sorry for the long delay but it could not be helped.